Online Measurement Technique for Melt Surface Level of Si Crystal in Growth Furnace of Czochralski Method
نویسندگان
چکیده
منابع مشابه
Development of Crystal Growth Technique of Silicon by the Czochralski Method
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
سال: 2007
ISSN: 0387-5024,1884-8354
DOI: 10.1299/kikaic.73.2976